Laser modification of the electrical properties of vanadium oxide thin films

G. B. Stefanovich; A. L. Pergament; F. A. Chudnovskii; D. O. Kikalov

doi:10.1117/12.344725

8 April 1999 Laser modification of the electrical properties of vanadium oxide thin films

G. B. Stefanovich, A. L. Pergament, F. A. Chudnovskii, D. O. Kikalov

Proceedings Volume 3725, International Conference on Solid State Crystals '98: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology; (1999) https://doi.org/10.1117/12.344725
Event: International Conference on Solid State Crystals '98, 1998, Zakopane, Poland

Abstract

The effect of laser irradiation on amorphous films of anodic vanadium oxide was studied using a YAG:Nd³⁺ laser at wavelength 1.06 micrometers . Irradiation was found to lower the electrical conductivity of the oxide films and modify significantly the parameters of electroforming and switching in metal/oxide/metal sandwich structures. The threshold energy for laser modification was measured to be approximately 0.3 mJ/cm². It is shown that the changes of the electrical properties are associated with structural (crystallization) and chemical (in particular, the reduction V₂O₅ yields VO₂) transformations and that non- thermal photo-stimulated effects play an important role in the laser modification of the vanadium oxide thin films.

Citation Download Citation

G. B. Stefanovich, A. L. Pergament, F. A. Chudnovskii, and D. O. Kikalov "Laser modification of the electrical properties of vanadium oxide thin films", Proc. SPIE 3725, International Conference on Solid State Crystals '98: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology, (8 April 1999); https://doi.org/10.1117/12.344725

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