Theoretical studies on energy loss processes in a discharge-pumped ArF excimer laser

Hideo Furuhashi; Jun Yamada; Yoshiyuki Uchida

doi:10.1117/12.346793

29 April 1999 Theoretical studies on energy loss processes in a discharge-pumped ArF excimer laser

Hideo Furuhashi, Jun Yamada, Yoshiyuki Uchida

Proceedings Volume 3729, Selected Papers from International Conference on Optics and Optoelectronics '98; (1999) https://doi.org/10.1117/12.346793
Event: Selected Papers from the International Conference on Optics and Optoelectronics, 1998, Dehradun, India

Abstract

A kinetic model for a discharge-pumped ArF excimer laser has been developed. The electrical circuit loss, collision loss of electrons and atoms in plasma, and photon absorption loss were calculated. The energy loss process from the electrical input to the laser output is discussed. It was found that 34% of the electrical input is lost in the electrical circuit, 30% of the deposited energy is lost as a elastic collision loss. Since there are large quenching losses and photo absorptions, the laser output energy is several percent of the input energy.

Citation Download Citation

Hideo Furuhashi, Jun Yamada, and Yoshiyuki Uchida "Theoretical studies on energy loss processes in a discharge-pumped ArF excimer laser", Proc. SPIE 3729, Selected Papers from International Conference on Optics and Optoelectronics '98, (29 April 1999); https://doi.org/10.1117/12.346793

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