30 April 1999 Piezoresistive pressure sensors for medical applications
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Proceedings Volume 3730, Optoelectronic and Electronic Sensors III; (1999) https://doi.org/10.1117/12.346866
Event: Optoelectronic and Electronic Sensors III, 1998, Jurata, Poland
Abstract
Miniature high-sensitive pressure sensors on the basis of semiconductor whiskers and laser recrystallized SOI layers have been developed. Design examples of the sensors and some devices for medical purpose are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Inna Maryamova, Inna Maryamova, Elena Lavitska, Elena Lavitska, Igor Kogut, Igor Kogut, Alexey Kutrakov, Alexey Kutrakov, } "Piezoresistive pressure sensors for medical applications", Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); doi: 10.1117/12.346866; https://doi.org/10.1117/12.346866
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