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30 April 1999 Piezoresistive pressure sensors for medical applications
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Proceedings Volume 3730, Optoelectronic and Electronic Sensors III; (1999) https://doi.org/10.1117/12.346866
Event: Optoelectronic and Electronic Sensors III, 1998, Jurata, Poland
Abstract
Miniature high-sensitive pressure sensors on the basis of semiconductor whiskers and laser recrystallized SOI layers have been developed. Design examples of the sensors and some devices for medical purpose are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Inna Maryamova, Elena Lavitska, Igor Kogut, and Alexey Kutrakov "Piezoresistive pressure sensors for medical applications", Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); https://doi.org/10.1117/12.346866
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