28 January 1999 Laser technologies in diffractive optics
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Proceedings Volume 3733, ICONO '98: Nonlinear Optical Phenomena and Coherent Optics in Information Technologies; (1999) https://doi.org/10.1117/12.340090
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation
Abstract
Computer-generated holograms are limited by conventional lithographic fabrication capabilities, which rely on accurate deposition, exposure, and developing of photosensitive chemicals. We present alternate fabrication technologies, which use a focused laser beam to write submicron patterns by inducing changes in a metal or silicon film and LDW glass. Circular laser writing systems built at IA&E are described. This paper has reviewed some techniques and equipment for the fabrication of binary, multilevel and continuous-relief DOEs developed at IA&E.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Voldemar Petrovich Koronkevich, Voldemar Petrovich Koronkevich, Victor Pavlovich Korolkov, Victor Pavlovich Korolkov, Alexander G. Poleshchuk, Alexander G. Poleshchuk, } "Laser technologies in diffractive optics", Proc. SPIE 3733, ICONO '98: Nonlinear Optical Phenomena and Coherent Optics in Information Technologies, (28 January 1999); doi: 10.1117/12.340090; https://doi.org/10.1117/12.340090
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