15 March 1999 Linear and nonlinear optical properties of silicon micro- and nanocrystallites
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Proceedings Volume 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures; (1999) https://doi.org/10.1117/12.342366
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation
Abstract
Silicon crystallites produced by low temperature plasma- enhanced chemical vapor deposition technique have been shown size-dependent photoluminescent and second harmonic generation responses. The crystalline volume fraction was estimated by using Raman spectra. The grain sizes of crystallites were measured by using x-ray diffraction. The structural chemical properties of poly-Si films were studied by means of Fourier-transform infrared spectroscopy and transmission spectrophotometry. The size- and shape- dependent second-harmonic generation of poly-Si films is, also, studied. The second-harmonic generation intensity for poly-Si deposited by using SiH4/SiF4/H2 gas mixture as function of such deposition conditions as hydrogen flow rate, silicon tetrafluoride flow rate, deposition temperature was studied.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dmitri Milovzorov, Dmitri Milovzorov, Takao Inokuma, Takao Inokuma, Yoshihiro Kurata, Yoshihiro Kurata, Seiichi Hasegawa, Seiichi Hasegawa, Takanori Suzuki, Takanori Suzuki, } "Linear and nonlinear optical properties of silicon micro- and nanocrystallites", Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); doi: 10.1117/12.342366; https://doi.org/10.1117/12.342366
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