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27 August 1999 Misalignment modes in high-performance optical systems
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Misalignment modes are combinations of rigid-body perturbations to the optical elements that comprise an optical system. Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specification such as chief- ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can 'fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an extreme ultraviolet lithography projection camera.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael R. Descour, Mark R. Willer, and Curtis Earl Volin "Misalignment modes in high-performance optical systems", Proc. SPIE 3737, Design and Engineering of Optical Systems II, (27 August 1999);


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