7 September 1999 Enhancement of the diffraction efficiency of titanium implanted gratings by associating them with optical interference coatings
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Abstract
Refractive index gratings made by titanium ion implantation are studied. Computations using the rigorous differential method and otpical measurements show that our gratings implanted in SiO2 substrates have a diffraction efficiency of typically 2 percent in the 1st order. We propose to insert such grating in multilayer dielectric Fabry-Perot cavities in order to enhance the free space diffraction efficiency. Computations are performed by taking into account the index profile of the implanted zone. The best structure is obtained by optimizing the thickness of the implanted silica layer which is embedded between two mirrors. We study the dependence of optical properties of the structure with respect to various characteristic parameters such as the index profile, the multilayer design, the filling factor of the grating and the incident angle. To demonstrate the feasibility of such components, we focus our attention on an implanted grating embedded in a Fabry-Perot cavity whose mirrors have five dielectric layers. This component reaches a theoretical efficiency of 10 percent in the 1st order. First experimental results are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francois Flory, Francois Flory, Ludovic Escoubas, Ludovic Escoubas, Stephane Tisserand, Stephane Tisserand, Eric Nicolas, Eric Nicolas, Gerard Albrand, Gerard Albrand, F. Lemarchand, F. Lemarchand, Laurent Roux, Laurent Roux, } "Enhancement of the diffraction efficiency of titanium implanted gratings by associating them with optical interference coatings", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); doi: 10.1117/12.360094; https://doi.org/10.1117/12.360094
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