New interferometric method for the complete determination of the properties of the light field scattered by a rough surface

Michel Lequime; Nathalie Destouches; Hugues Giovannini

doi:10.1117/12.360104

7 September 1999 New interferometric method for the complete determination of the properties of the light field scattered by a rough surface

Michel Lequime, Nathalie Destouches, Hugues Giovannini

Author Affiliations +

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360104
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Total integrated scattering (TIS) and bi-directional reflectance distribution function measurements give information on the mean roughness of the surface and on the modulus of the Fourier Transform of the 2D surface profile. To obtain a more precise description of a rough surface and to get an estimation of the relative contribution of surface and volume scattering in multilayers stack, we have developed a new interferometric method which allows us to measure the variation of the phase of the Fourier Transform of the surface profile as a function of the scattering angle. This paper includes a detailed presentation of this method, a description of the experimental set-up used for its principle validation, as well as some preliminary results that we have obtained with it on high reflectance samples.

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Michel Lequime, Nathalie Destouches, and Hugues Giovannini "New interferometric method for the complete determination of the properties of the light field scattered by a rough surface", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360104

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