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6 September 1999 Critical aspects of testing aspheres in interferometric setups
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Abstract
Several critical aspects when testing aspherical surfaces by means of interferometry are reported. The aspheres are in the range of some microns to some 100 microns to some 100 microns of deviation from best fitting spheres. The required accuracy is a few nm. A compensating system has to be used to transform the interferometer's spherical wavefront to a wavefront that fits the asphere under test. Some special aspects will be discussed that are different to the test of spheres. Effects on the wavefront from lateral distortion, field curvature, and alignment of the compensating system need to be handled. The most problematic item up to now is the limited accuracy of the rotational symmetrical errors. The calibration of those errors still is much more uncertain than calibrations of unsymmetric errors or complete calibrations of spheres.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank Schillke "Critical aspects of testing aspheres in interferometric setups", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360159
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