High-precision cylindrical and quasi-cylindrical aspherization of small surfaces by ion beam figuring

Raymond Mercier; Michel Mullot; Michel Lamare; Gerard Tissot

doi:10.1117/12.360139

6 September 1999 High-precision cylindrical and quasi-cylindrical aspherization of small surfaces by ion beam figuring

Raymond Mercier, Michel Mullot, Michel Lamare, Gerard Tissot

Proceedings Volume 3739, Optical Fabrication and Testing; (1999) https://doi.org/10.1117/12.360139
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

We have used a broad ion beam technique to generate cylindrical structures. Although limited to small dimensions, it produces potentially high precision smooth surfaces. As a first trial, four surfaces were produced for an industrial application, using a fairly simple mask; the 8 mm wide, 3 micrometers deep W profile cylinder was engraved on silicon substrates. Reproducibility was in the range of 1 percent when working in reproducible conditions, allowing refinement of the mask. We shall discuss the limitations of the method and improvement of the mask. We shall discuss a project extending the method to quasi-cylindrical figuring: the fabrication of a diffraction-limited off-axis ellipsoidal mirror at a 21 nm wavelength, with, as a first trial, the fabrication of a toroidal surface to a nanometric precision.

Citation Download Citation

Raymond Mercier, Michel Mullot, Michel Lamare, and Gerard Tissot "High-precision cylindrical and quasi-cylindrical aspherization of small surfaces by ion beam figuring", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360139

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