6 September 1999 Ion beam figuring of small BK7 and Zerodur optics: thermal effects
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Abstract
Ion beam figuring is a deterministic optical fabrication technique which efficiency has been mainly demonstrated on large optics these last years. One of the disadvantages of ion figuring is the high surface temperature of the workpiece. Temperature aspects have already ben mentioned by some authors but are weakly detailed. Therefore thermal effects on BK7 and Zerodur, mainly surface figure distortions and surface temperature measurements, have been investigated here in more detail.
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Patrick Gailly, Patrick Gailly, Jean-Paul Collette, Jean-Paul Collette, Luc F.P. Renson, Luc F.P. Renson, Jean Philippe Tock, Jean Philippe Tock, } "Ion beam figuring of small BK7 and Zerodur optics: thermal effects", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360136; https://doi.org/10.1117/12.360136
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