Paper
6 September 1999 Large optics ion figuring
Roland Geyl, Andre Rinchet, Emmanuel Rolland
Author Affiliations +
Abstract
In 1994, REOSC took the decision to set up a large optics Ion figuring facility to be operational within 18 months. The equipment was designed to be able to accept components up to the maximum dimensions of 1.3 X 1.3 X 1.3 meters mounted in a high-vacuum chamber. After a period of design, fabrication, installation and validation, the Ion Beam Facility came is now, since more than two years, fully integrated in our production line as an efficient complementary technique to the mechanical polishing. We present in this paper some experimental results showing the maturity of the technology as well as some recent improvements and future applications.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roland Geyl, Andre Rinchet, and Emmanuel Rolland "Large optics ion figuring", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360141
Lens.org Logo
CITATIONS
Cited by 6 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Ions

Ion beams

Mirrors

Polishing

Silicon carbide

Zerodur

Aspheric lenses

RELATED CONTENT

Manufacturing and testing large SiC mirrors in an efficient way
Proceedings of SPIE (September 24 2015)
Flatness correction of NZTE mask blank substrates
Proceedings of SPIE (August 20 2001)
Progress in ion figuring large optics
Proceedings of SPIE (July 14 1995)
Lightweight mirrors from single-crystal silicon
Proceedings of SPIE (December 12 2003)
Ion beam figuring of silicon aspheres
Proceedings of SPIE (February 23 2011)

Back to Top