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6 September 1999 Metrology of precision optical surfaces and laser mirrors: I
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Abstract
The comparison of different methods of measuring surface roughness parameters, i.e. angle-resolved scattering (ARS) technique and atomic force microscope (AFM) profilometry, was performed for quartz precise optical surfaces, obtained by different polishing processes. The functions of power spectral density, calculated form ARS, using vector scattering theory, and form AFM data are in good agreement in the range of polar scatter angles 30..75 degrees. In this range the angular scattering is well predicted using the exponential autocorrelation function with parameters, calculated from surface profile. The autocorrelation length, calculated from ARS data in above range using exponential statistics, remains practically constant for different surfaces, obtained by the same polishing process. The latter allows to consider it as the characteristic parameter of certain polishing process.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valentina V. Azarova, Igor Dronov, Aleksandr Karcev, Vlad Sharov, and Konstantin Malickiy "Metrology of precision optical surfaces and laser mirrors: I", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360169
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