Development of state-of-the-art devices on the subnanometer grinding machine tool for optical glasses

Hiroshi Eda; Lotfi Chouanine; Jun Shimizu; Libo Zhou

doi:10.1117/12.347833

7 May 1999 Development of state-of-the-art devices on the subnanometer grinding machine tool for optical glasses

Hiroshi Eda, Lotfi Chouanine, Jun Shimizu, Libo Zhou

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347833
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

This paper gives an overview of development of the kernel technologies and parameter generalization at ductile mode conditions for grinding of optical glasses. An ultra precision machine tool capable of multiply functioning grinding, cutting, lapping or polishing has been newly developed for the ductile-mode grinding of hard-brittle materials. The key components built in the system are inclusive of the force transducer for sub-mN measurement and the PZT actuator for precise positioning. Through the grinding tests and scratching tests, the machining parameters governing the brittle-to- ductile transition have been established for a series of glasses. It also reveals a fact that the critical depth in grinding is thereabouts six times bigger than the critical depth in indentation and seven times than in scratching.

Citation Download Citation

Hiroshi Eda, Lotfi Chouanine, Jun Shimizu, and Libo Zhou "Development of state-of-the-art devices on the subnanometer grinding machine tool for optical glasses", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347833

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