Fine OPC approach with gray-tone coding mask

Jinglei Du; Jingqin Su; Qizhong Huang; Yixiao Zhang; Yongkang Guo; Chunlei Du; Zheng Cui

doi:10.1117/12.347834

7 May 1999 Fine OPC approach with gray-tone coding mask

Jinglei Du, Jingqin Su, Qizhong Huang, Yixiao Zhang, Yongkang Guo, Chunlei Du, Zheng Cui

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347834
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

In this paper, a new method has been proposed to realize fine OPC with gray-tone coding mask instead of gray-tone mask. The relationships of the gray-tone coding mask and gray-tone mask have been discussed, and OPC simulation results are given with the gray-tone coding mask.

Citation Download Citation

Jinglei Du, Jingqin Su, Qizhong Huang, Yixiao Zhang, Yongkang Guo, Chunlei Du, and Zheng Cui "Fine OPC approach with gray-tone coding mask", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347834

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