7 May 1999 Interferometry method for measuring head-disk spacing down to contact
Author Affiliations +
Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347754
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan
Abstract
In this paper, we give a detailed analysis of the working principle, application limits, and potential problems of the intensity interferometry flying height testing, one of the most popularly used flying height testing techniques. Then, a phase-shift method is proposed to improve the sensitivity of this technique when the head-disk spacing is below 10 nm or near contact, based on manufacturing the glass testing disk to have a thickness within specified tolerances. Theoretical analysis and numerical evaluation are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xinqun Liu, Xinqun Liu, Warwick W. Clegg, Warwick W. Clegg, Bo Liu, Bo Liu, } "Interferometry method for measuring head-disk spacing down to contact", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347754; https://doi.org/10.1117/12.347754
PROCEEDINGS
4 PAGES


SHARE
Back to Top