7 May 1999 Light sectioning for step profile measurement using a spatial filter in a sensing unit
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Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347752
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan
Abstract
We propose a new profile measurement system with light sectioning, which is available to detect step profiles on objects. We can intercept obstructive signals due to the day light reflected from the objects, by using a modulated laser beam and lock-in demodulation. The performance of this system was confirmed by experiments, in which step profiles of objects at a distance of 500 mm could be measured.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tetsuya Matsumoto, Yoichi Kitagawa, Kazumo Nakazato, Masaaki Adachi, "Light sectioning for step profile measurement using a spatial filter in a sensing unit", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347752; https://doi.org/10.1117/12.347752
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