7 May 1999 Measurement for thickness variation of a latex membrane by ESPI method
Author Affiliations +
Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347771
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan
Abstract
A simple and unique ESPI based system for real-time monitoring and measuring of thickness variation of semi-transparent membrane with an 'optically rough surface' is described in this paper. When membrane or film is illuminated by a coherent beam, a speckle pattern is produced on its rough surface. Reflected beams from both the bottom and top surfaces of the membrane combine and form a speckle interferometric pattern, which can be captured by CCD camera. Subtraction of sequentially captured images result in correlation fringes corresponding to thickness variation of the specimen. The beams reflected from both bottom and top surfaces serve as 'reference' beam for each other mutually. All the beams coming from the tested object possess an auto-reference feature and this makes the system more stable and simple.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anand Krishna Asundi, Anand Krishna Asundi, Lijun Jiang, Lijun Jiang, } "Measurement for thickness variation of a latex membrane by ESPI method", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347771; https://doi.org/10.1117/12.347771
PROCEEDINGS
4 PAGES


SHARE
RELATED CONTENT


Back to Top