Translator Disclaimer
7 May 1999 New deep-UV microscope
Author Affiliations +
Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347845
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan
Abstract
We report a deep-UV microscope having the best resolution of any optical microscope. The resolution limit is less than 0.1 micron, which is close to the resolution limit of a scanning electron microscope (SEM). Moreover, measurement without vacuum chamber is possible using the new deep-UV microscope. The deep-UV microscope is suitable for inspecting semiconductors, magnetic heads and optical disks.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Naoya Eguchi, Michio Oka, Yutaka Imai, Masaki Saito, and Shigeo R. Kubota "New deep-UV microscope", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347845
PROCEEDINGS
4 PAGES


SHARE
Advertisement
Advertisement
Back to Top