7 May 1999 New error-compensation method in a linear encoder using phase-shifted grating
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Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347780
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan
Abstract
A new hardware compensation method reducing displacement measurement errors, caused by tilt of index scale in moire type linear encoder, has been developed. In the conventional moire type linear encoders, the detectors are aligned perpendicular to the line of moire fringes and this structure is very sensitive to an unwanted tilt of the gratings. In this paper, newly designed grating, named as phase shifted grating, is developed to compensate non-orthogonal error. By adopting the phase shifted grating instead of conventional index one, it is possible to reduce non-orthogonal error of the moire type linear encoder.
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Ju Ho Song, Ju Ho Song, Kyung-Chan Kim, Kyung-Chan Kim, Soo Hyun Kim, Soo Hyun Kim, Yoon Keun Kwak, Yoon Keun Kwak, } "New error-compensation method in a linear encoder using phase-shifted grating", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); doi: 10.1117/12.347780; https://doi.org/10.1117/12.347780
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