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7 May 1999 Practical measurement system for determination of refractive index and thickness using low-coherence interferometry
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Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347811
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan
Abstract
Very recently, we developed a computer-controlled low- coherence interferometer system with precise translation stages for simultaneous measurement of refractive index and thickness. Both phase and group indices can be determined automatically in a wide thickness range of 20 micrometer to a few mm. This paper presents the system configuration and the measurement principle accompanied with typical examples of automatic measurement.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hideki Maruyama, Shogo Inoue, Masato Ohmi, Keita Ihara, Shoji Nakagawa, and Masamitsu Haruna "Practical measurement system for determination of refractive index and thickness using low-coherence interferometry", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347811
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