23 April 1999 Automated cost of ownership analysis for process development
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Proceedings Volume 3742, Process and Equipment Control in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346235
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom
This paper describes how costings analysis can be incorporated into a framework for process development. It describes how Cost of Ownership can be calculated from the information stored within existing process development tools through the use of CASTT (Cost Analysis in Total TCAD). It provides a method by which manufacturing costs can be forecast and alternative processing options can be compared. The existing elements of Total TCAD framework are described, an outline of the CASTT software is then given and examples are used to illustrate its potential.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vidar K. Nilsen, Vidar K. Nilsen, Anthony J. Walton, Anthony J. Walton, } "Automated cost of ownership analysis for process development", Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); doi: 10.1117/12.346235; https://doi.org/10.1117/12.346235


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