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23 April 1999 Optical integrated circuit for quality control
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Proceedings Volume 3742, Process and Equipment Control in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346239
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom
Abstract
Vision systems in quality control are increasingly widespread but are currently suffering from limitations in certain applications which concern as well their processing capability and their miniaturization. Today modern optics and electronics make it possible to consider integration of the sensors for acquisition and the processors for the image processing on a same circuit. The goal of this article is to present the broad outline of our sensor architecture and to formalize a motion detection method set up in a processor network optimized for a given algorithm.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Delphine Emzivat, Claude Gagnadre, and Eric Martin "Optical integrated circuit for quality control", Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); https://doi.org/10.1117/12.346239
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