27 April 1999 Advanced holography for microelectronic manufacturing: novel methods well fitted for real time in the line checks performed in the industrial environment
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Abstract
Current manufacturing processes require rapid, inexpensive and reliable techniques for optical inspections of machinery, products and components. Holography and holographic interferometry in spite of their attractive features are rather rarely used for industrial inspections due to relative complexity, costs, lengthy multi-stage procedures, need of dark roms and vibration insulation. Personnel skilled in optics ins also required. Thus holography is usually regarded as poorly compatible with practical industrial environment.
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Valery Petrov, Valery Petrov, } "Advanced holography for microelectronic manufacturing: novel methods well fitted for real time in the line checks performed in the industrial environment", Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); doi: 10.1117/12.346906; https://doi.org/10.1117/12.346906
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