27 April 1999 Technique of analog integrated circuit yield analysis
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The technique of analog integrated circuits statistical analysis is suggested. This technique enables to determine the interrelation between integrated circuit yield on the one hand and the dimensions of elements on the other hand. The idea is based on the common use of experimental statistical analysis and statistical modeling and on the introduction of the concept of the integrated circuit intermediate parameters. The results of statistical analysis of two analog integrated circuits has been cited as an example of suggested technique. They show that there exist optimal dimensions of integrated circuits elements by yield maximum criteria and the values of optimal dimensions of elements depend on process technology level and the requirements for integrated circuits output parameters.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Algirdas Baskys, Algirdas Baskys, Vitold Gobis, Vitold Gobis, } "Technique of analog integrated circuit yield analysis", Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); doi: 10.1117/12.346931; https://doi.org/10.1117/12.346931


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