Real-time shape measurement by integrated phase-shifting method

Yoshiharu Morimoto; Motoharu Fujigaki; Hiroki Toda

doi:10.1117/12.357702

13 August 1999 Real-time shape measurement by integrated phase-shifting method

Yoshiharu Morimoto, Motoharu Fujigaki, Hiroki Toda

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357702
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

Phase distribution analysis of deformed gratings in moire method and grating projection method provides accurate shape of specimen. We previously proposed the phase-shifting method using correlation with a rectangular function. The phase analysis uses many images during phase shifting of the projected grating. In this paper, we propose a new real-time phase analysis method, that is, the integrated phase- shifting method using four images of phase-shifted grating patterns with a rectangular brightness distribution. The theory and some applications to shape measurement are shown.

Citation Download Citation

Yoshiharu Morimoto, Motoharu Fujigaki, and Hiroki Toda "Real-time shape measurement by integrated phase-shifting method", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357702

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