13 August 1999 Shape measurement by speckle interferometry using holographic optical element
Author Affiliations +
Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357708
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland
Abstract
Contouring by electronic speckle pattern interferometry is one of the most difficult measuring problems in the range of micrometers. The requirement of the position alignment of the master wavefront (smooth or speckled) and the wavefront of the test object by interferometric accuracy is always a difficult task and prevents the application of this method for quality controlling. To overcome the difficulties, in our paper a new two-wavelength method is presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Attila Nemeth, Janos Kornis, "Shape measurement by speckle interferometry using holographic optical element", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); doi: 10.1117/12.357708; https://doi.org/10.1117/12.357708
PROCEEDINGS
7 PAGES


SHARE
Back to Top