17 August 1999 Fabrication and metrology of km-scale radii on surfaces of master tooling
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Proceedings Volume 3745, Interferometry '99: Applications; (1999); doi: 10.1117/12.357762
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland
Abstract
The Laser Interferometer Gravitational-wave Observatory (LIGO) core optical components have been manufactured by CSIRO. These optical substrates are optically polished on a lap surface that is made of Teflon coated onto a thick rigid faceted Zerodur base. To produce the km-scale radii (> 10 km) on these substrates the lap surface is shaped by abrading it with a fine ground silica plate whose radius of curvature corresponds to the one specified for the LIGO component. The plates are measured by a commercial phase stepping interferometer which is used in a grazing incidence arrangement. We describe the process of shaping and measuring the conditioning plates and laps.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Achim J. Leistner, Bozenko F. Oreb, Jeffrey A. Seckold, Christopher J. Walsh, "Fabrication and metrology of km-scale radii on surfaces of master tooling", Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); doi: 10.1117/12.357762; http://dx.doi.org/10.1117/12.357762
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