Hybrid analysis of optical elements by interferometry and thermography

Andrzej Szwedowski; Marcin Lesniewski

doi:10.1117/12.357763

17 August 1999 Hybrid analysis of optical elements by interferometry and thermography

Andrzej Szwedowski, Marcin Lesniewski

Proceedings Volume 3745, Interferometry '99: Applications; (1999) https://doi.org/10.1117/12.357763
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

Effects of thermal deformations of optical elements may be visualized and measured by interferometric methods. They correspond to the deformation of heated optical surface and/or deformation of the wave front of the light beam propagating through optical elements. In one of the experiments the optical effects for a single optical element heated by CO₂ laser were measured. Single element was combined with the second optical element for spherical aberration correction. The measurement stand used was composed of five modules: interferometers in Fizeau or Twyman-Green configuration (He-Ne, aperture 100 mm), CO₂ laser with the device for changing and measuring the power of the laser beam, the substrate module, thermovision camera AGEMA 470 for temperature measuring and the module for control, registration and analysis of interferometric images. The results of measurements provide the form of the wave front shape in combination with the thermal gradient of the surface. The experimental results are compared with computer simulated effects of the optical path difference and the temperature distribution calculated by the finite element method.

Citation Download Citation

Andrzej Szwedowski and Marcin Lesniewski "Hybrid analysis of optical elements by interferometry and thermography", Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); https://doi.org/10.1117/12.357763

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