17 August 1999 Selection of interferometric methods for silicon microelement testing
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Proceedings Volume 3745, Interferometry '99: Applications; (1999) https://doi.org/10.1117/12.357792
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland
Abstract
In this paper we discuss the problems connected with analysis of mechanical properties of silicon microelements being basic parts of MEMS (e.g. micromembranes, microbeams). The quality of these microproducts (the reliability and the lifetime) is strongly dependent on the material properties and the mechanical design. There is also strong influence of the technology process on their performance. The best suited methods for their testing are optical full-field measuring methods. They provide data (displacements, strains, distribution of material constants) which may be easily used in the hybrid experimental-numerical methods for microelements analysis and optimization of their design.
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Witold Gorski, Malgorzata Kujawinska, Leszek A. Salbut, "Selection of interferometric methods for silicon microelement testing", Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); doi: 10.1117/12.357792; https://doi.org/10.1117/12.357792
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