19 July 1999 Active micromirror: a new adaptive optical microcomponent
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Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999); doi: 10.1117/12.354879
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
The AMM is a new kind of micromachined deformable mirror. It is a silicon mirror which can be electrostatically actuated by electrodes located on each side of the mirror. In this article we describe the characteristics and the results of modelization and testing of our deformable micro mirror.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gilles Robert, A. Coville, L. Babadjian, Serge Spirkovitch, "Active micromirror: a new adaptive optical microcomponent", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354879; https://doi.org/10.1117/12.354879
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KEYWORDS
Mirrors

Electrodes

Micromirrors

Active optics

Adaptive optics

Aluminum

Reflectivity

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