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19 July 1999 Integrated micromachined scanning display systems
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Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354841
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
We describe a raster-scanning display system comprised of two tilt-up micromachined polysilicon mirrors that rotate about orthogonal axes. We have demonstrated a resolution of 102 X 119 pixels. The optical efficiency of our two- mirror micro-optical raster-scanning system is comparable to that of micromachined display systems developed by Texas Instruments and Silicon Light Machines. Ease of integration with on-chip light sources and lenses has the potential to reduce packaging size, complexity and cost of the display system and makes it well suited for head-mounted display applications.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul M. Hagelin, Uma Krishnamoorthy, Robert A. Conant, Richard S. Muller, Kam Y. Lau, and Olav Solgaard "Integrated micromachined scanning display systems", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354841
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