Inverse problem of heterodyne differential microscope for steplike object

D. V. Baranov; Alexandre A. Yegorov; Evgeny M. Zolotov; Konstantin K. Svidzinsky

doi:10.1117/12.355021

19 July 1999 Inverse problem of heterodyne differential microscope for steplike object

D. V. Baranov, Alexandre A. Yegorov, Evgeny M. Zolotov, Konstantin K. Svidzinsky

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.355021
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

The solution of inverse problem of heterodyne differential microscope based on representation of linear part of microscope response by moments of object function is realized. The parameters of step-like object was determined with superresolution.

Citation Download Citation

D. V. Baranov, Alexandre A. Yegorov, Evgeny M. Zolotov, and Konstantin K. Svidzinsky "Inverse problem of heterodyne differential microscope for steplike object", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.355021

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