Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator

Omar Manzardo; Cornel Marxer; Hans Peter Herzig

doi:10.1117/12.354842

19 July 1999 Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator

Omar Manzardo, Cornel Marxer, Hans Peter Herzig

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354842
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

In this paper we present a miniaturized Fourier Transform spectrometer based on a Michelson interferometer with a scanning mirror. The motion of the mirror is carried out by a new type of electrostatic comb drive actuator. The displacement of the mirror is linear with the applied voltage. Experimental results are presented.

Citation Download Citation

Omar Manzardo, Cornel Marxer, and Hans Peter Herzig "Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354842

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