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19 July 1999 Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator
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Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354842
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
In this paper we present a miniaturized Fourier Transform spectrometer based on a Michelson interferometer with a scanning mirror. The motion of the mirror is carried out by a new type of electrostatic comb drive actuator. The displacement of the mirror is linear with the applied voltage. Experimental results are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Omar Manzardo, Cornel Marxer, and Hans Peter Herzig "Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354842
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