Paper
19 July 1999 New Fourier transform profilometry based on modulation measurement
Author Affiliations +
Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354824
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
This article propose a new Fourier transform profilometry based on modulation measurement. We briefly call it FTP based on MM. Its main advantage is that it can measure the surface of a complex object in the same direction of projecting light, so it has no the difficulties due to shadow and spatial discontinuity that exist in conventional FTP and also PMP methods. In the paper, we give the principle of the method, the set-up of measurement system, and some primary experimental results. The results proved that this method is a promising method for acquiring 3D data of complex object.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianyu Su, Likun Su, and Wansong Li "New Fourier transform profilometry based on modulation measurement", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354824
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Cited by 21 scholarly publications.
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KEYWORDS
Modulation

Fourier transforms

Fringe analysis

3D metrology

Phase measurement

3D modeling

3D surface sensing

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