Simultaneous calibration algorithm of phase-shifting based on FFT

Wansong Li; Likun Su; Xianyu Su; Liqun Xiang

doi:10.1117/12.354876

19 July 1999 Simultaneous calibration algorithm of phase-shifting based on FFT

Wansong Li, Likun Su, Xianyu Su, Liqun Xiang

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354876
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

In phase-measuring profilometry, the accuracy of the phase- shifting is very important. In this paper, a new simultaneous calibration algorithm of phase-shifting based on fast Fourier transform (FFT) is presented. The current phase shifting is calculated with the help of the information of an additional fringe pattern and a FFT modulation mask. With this algorithm, we can accurately control the moving of the project grating simultaneous, the accuracy and the automation of the measuring system are improved greatly.

Citation Download Citation

Wansong Li, Likun Su, Xianyu Su, and Liqun Xiang "Simultaneous calibration algorithm of phase-shifting based on FFT", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354876

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