19 July 1999 Simultaneous calibration algorithm of phase-shifting based on FFT
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Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354876
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States
Abstract
In phase-measuring profilometry, the accuracy of the phase- shifting is very important. In this paper, a new simultaneous calibration algorithm of phase-shifting based on fast Fourier transform (FFT) is presented. The current phase shifting is calculated with the help of the information of an additional fringe pattern and a FFT modulation mask. With this algorithm, we can accurately control the moving of the project grating simultaneous, the accuracy and the automation of the measuring system are improved greatly.
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Wansong Li, Wansong Li, Likun Su, Likun Su, Xianyu Su, Xianyu Su, Liqun Xiang, Liqun Xiang, "Simultaneous calibration algorithm of phase-shifting based on FFT", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354876; https://doi.org/10.1117/12.354876
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