Paper
29 September 1999 Development of multilayer coated gratings for high-energy x-ray spectroscopy
Keisuke Tamura, Koujun Yamashita, Hideyo Kunieda, Tsutomu Yoshioka, Manabu Watanabe, Kazutoshi Haga
Author Affiliations +
Abstract
The multilayer coated grating for high energy x-ray spectroscopy above 6 keV was developed. We study the grating optics for high energy region using multilayer. We coated the laminar type grating, groove density/mm and depth of groove is 40 nm, with Pt/C multilayer, number of layer pairs is 10 and periodic length is 4.8 nm. We measured this gratings using the x-ray beam-line Nagoya University with the x-ray CCD system. The efficiency at the first order of grating was about 30 percent at the energy of Cu-K(alpha) with energy resolution of 128.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Keisuke Tamura, Koujun Yamashita, Hideyo Kunieda, Tsutomu Yoshioka, Manabu Watanabe, and Kazutoshi Haga "Development of multilayer coated gratings for high-energy x-ray spectroscopy", Proc. SPIE 3766, X-Ray Optics, Instruments, and Missions II, (29 September 1999); https://doi.org/10.1117/12.363651
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KEYWORDS
X-rays

Reflectivity

Diffraction

Diffraction gratings

Glasses

Spectroscopy

Energy efficiency

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