23 November 1999 EUV spectroscopy of ultrafast capillary discharges
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Abstract
The observation of EUV spectra of multiply charged ions excited by an ultrafast capillary discharge suggest the possibility of developing an intense compact source of soft x- ray and EUV radiation for practical applications (EUV lithography, microscopy, etc.). The discharge is driven by a compact water transmission line having a very fast current pulse (12 ns FHWM, rise time approximately 1 ns). Spectra of OV-OVI ions from a polyacetal capillary and ArVII-ArVIII ions from an Ar filled capillary were observed and investigated in a spectral range of 100 - 300 Angstrom using a 1-m grazing incidence spectrograph. The resulting capillary discharge plasmas have an electron temperature of approximately 25 - 35 eV, which could be increased to approximately 100 eV using a more powerful transmission line.
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Larry V. Knight, R. Steven Turley, Chris Crawford, Derek Hullinger, Alexander P. Shevelko, Oleg F. Yakushev, Richard Miller, "EUV spectroscopy of ultrafast capillary discharges", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); doi: 10.1117/12.371139; https://doi.org/10.1117/12.371139
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