23 November 1999 Testing of glancing incidence mirrors using sampled profile measurements
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Abstract
This paper reports on the development of a deterministic method of specifying the finish glancing-incidence mirrors in terms of their imaging performance. As a first step we have calculated the two-dimensional intensity distribution in the focal region of an elliptical mirror including the effects of small, arbitrary finish errors. This calculation is based on the physical-optics diffraction model, using the sampling theorem to interpolate between measured profile points, thereby avoiding numerical integration and leading to simple analytic results. In addition to giving deterministic image intensity distributions for particular profile data, it provides a means for validating and extending earlier test methods based on profile statistics -- the root-mean-square (RMS) finish error and its power-spectral density (PSD).
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene L. Church, Peter Z. Takacs, "Testing of glancing incidence mirrors using sampled profile measurements", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); doi: 10.1117/12.371108; https://doi.org/10.1117/12.371108
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