19 October 1999 New versatile x-ray analyzer using capillary focusing in the micrometer scale
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Abstract
In this paper, we will give first the description of a versatile material analyzer for x-ray crystallographic and compositional analyses. We will describe how we calculate and elaborate glass capillaries; we will describe some important parameters of the total reflection of x-rays: focusing, transparency, gain and divergence. Our first results concern a compositional study of CdZnTe crystals with a n x-ray beam diameter of 10 micrometers and we will show the variation of Zn on the surface of such a crystal. Another possibility of this device is x-ray microtopography of a film or of a wafer. We show, on one hand the way to find in classical centers by Laue micropatterns on the other hand we could establish a Bragg reflection pattern like those obtained in classical x-ray surface topography. In some heat treatments we can see so-called texture effects. We have also on our device the possibility to see microtexture effects in a way which can be compared to the Seeman-Bohlin experiment. The compositional experiments were also tested by SEM in order to see how these two devices complete each other. We can notice in some studies the advantages of x-rays because photons are less destructive than electrons.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles Burggraf, Charles Burggraf, Paul Fougeres, Paul Fougeres, Chris Burggraf, Chris Burggraf, Makram Hage-Ali, Makram Hage-Ali, Jean Marie Koebel, Jean Marie Koebel, A. Krauth, A. Krauth, R. Regal, R. Regal, J. L. Baltzinger, J. L. Baltzinger, Paul Siffert, Paul Siffert, } "New versatile x-ray analyzer using capillary focusing in the micrometer scale", Proc. SPIE 3768, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics, (19 October 1999); doi: 10.1117/12.366578; https://doi.org/10.1117/12.366578
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