22 September 1999 Methods to remove distortion artifacts in scanned projections
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Abstract
Artifacts induced by distortions which sometimes occur in two- dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew R. Kalukin, Andrew R. Kalukin, Zachary H. Levine, Zachary H. Levine, Charles Tarrio, Charles Tarrio, Sean P. Frigo, Sean P. Frigo, Ian McNulty, Ian McNulty, Y. Y. Wang, Y. Y. Wang, Cornelia C. Retsch, Cornelia C. Retsch, Markus Kuhn, Markus Kuhn, Barry L. Winn, Barry L. Winn, } "Methods to remove distortion artifacts in scanned projections", Proc. SPIE 3772, Developments in X-Ray Tomography II, (22 September 1999); doi: 10.1117/12.363726; https://doi.org/10.1117/12.363726
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