Design and performance of graded multilayers

Christian Morawe; Jean-Christophe Peffen; Olivier Hignette; Eric Ziegler

doi:10.1117/12.370083

16 November 1999 Design and performance of graded multilayers

Christian Morawe, Jean-Christophe Peffen, Olivier Hignette, Eric Ziegler

Proceedings Volume 3773, X-Ray Optics Design, Performance, and Applications; (1999) https://doi.org/10.1117/12.370083
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Hard x-ray focusing devices based on laterally graded multilayers are key elements to fully exploit the advantages of third generation synchrotron sources. We have developed a design method to produce laterally graded multilayers using sputter deposition techniques. The multilayers are adapted to the given application by the proper choice of layer materials, d spacing, and the partition of the two constituent materials. The optimization of all relevant parameters yields an ab initio estimation of the desired layer thickness gradient. The performance and the accuracy of this method are demonstrated. The experimental lateral thickness errors could be reduced below 0.5% RMS over a total length of 300 mm. Reflectivity measurements at different energies are in good agreement with theoretical simulations. During focusing experiments at 13 keV a spot size of 1 micrometer and a gain in flux of 1000 were achieved.

Citation Download Citation

Christian Morawe, Jean-Christophe Peffen, Olivier Hignette, and Eric Ziegler "Design and performance of graded multilayers", Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, (16 November 1999); https://doi.org/10.1117/12.370083

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available