CONFERENCE PROCEEDINGS
Advanced Search >
Home > Proceedings > Volume 3776 > Article
Translator Disclaimer
21 October 1999 Spectroscopic study of an ablative capillary discharge dedicated to the development of a soft x-ray amplifier
Remi Dussart; William E. S. Rosenfeld; Sven Goetze; Dunpin Hong; Christophe Cachoncinlle; Claude Fleurier; Jean-Michel Pouvesle
Author Affiliations +
Proceedings Volume 3776, Soft X-Ray Lasers and Applications III; (1999) https://doi.org/10.1117/12.366667
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States
Abstract
A fast capillary discharge for intense soft X-ray emission is under investigation for EUV lithography and X-ray laser studies. A high current pulse (60 kA) is driven into a 1 mm diameter polyethylene capillary and creates a highly ionized plasma of carbon produced by wall ablation. Input power density as high as 70 GW.cm-3 was injected. The X- ray emission is analyzed with a spectrometer efficient from 20 to 450 angstroms. Time resolved spectra are recorded with a gated MCP. A visible spectrometer was used to measure the Stark broadening of the CIV line at 580 nm and to determine the electron density at low input energy. The FLY code was used to evaluate the electron temperature from the intensity ratio of two lines emitting in the same wavelength domain.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Remi Dussart, William E. S. Rosenfeld, Sven Goetze, Dunpin Hong, Christophe Cachoncinlle, Claude Fleurier, and Jean-Michel Pouvesle "Spectroscopic study of an ablative capillary discharge dedicated to the development of a soft x-ray amplifier", Proc. SPIE 3776, Soft X-Ray Lasers and Applications III, (21 October 1999); https://doi.org/10.1117/12.366667
PROCEEDINGS
 6 PAGES
DOWNLOAD PDF SAVE TO MY LIBRARY
SHARE
GET CITATION
< Previous Article
|
Next Article >
Advertisement
Advertisement
KEYWORDS
RELATED CONTENT
Spatial coherence of a capillary discharge soft x-ray amplifier
Proceedings of SPIE (November 01 1997)
Experiments on soft x ray laser development in a tabletop...
Proceedings of SPIE (February 05 1992)
Toward saturation of a discharge-pumped soft x-ray amplifier
Proceedings of SPIE (September 25 1995)
Characteristics of a capillary-discharge flash x-ray generator
Proceedings of SPIE (November 26 2002)
Advances in capillary discharge soft x-ray laser research
Proceedings of SPIE (December 12 2001)
Laboratory soft x ray source based on high temperature capillary...
Proceedings of SPIE (December 01 1991)
Lasing in Ne like S and other new developments in...
Proceedings of SPIE (November 01 1997)
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top