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21 October 1999 Spectroscopic study of an ablative capillary discharge dedicated to the development of a soft x-ray amplifier
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Abstract
A fast capillary discharge for intense soft X-ray emission is under investigation for EUV lithography and X-ray laser studies. A high current pulse (60 kA) is driven into a 1 mm diameter polyethylene capillary and creates a highly ionized plasma of carbon produced by wall ablation. Input power density as high as 70 GW.cm-3 was injected. The X- ray emission is analyzed with a spectrometer efficient from 20 to 450 angstroms. Time resolved spectra are recorded with a gated MCP. A visible spectrometer was used to measure the Stark broadening of the CIV line at 580 nm and to determine the electron density at low input energy. The FLY code was used to evaluate the electron temperature from the intensity ratio of two lines emitting in the same wavelength domain.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Remi Dussart, William E. S. Rosenfeld, Sven Goetze, Dunpin Hong, Christophe Cachoncinlle, Claude Fleurier, and Jean-Michel Pouvesle "Spectroscopic study of an ablative capillary discharge dedicated to the development of a soft x-ray amplifier", Proc. SPIE 3776, Soft X-Ray Lasers and Applications III, (21 October 1999); https://doi.org/10.1117/12.366667
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