PROCEEDINGS VOLUME 3777
SPIE'S INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION | 18-23 JULY 1999
Charged Particle Optics IV
Editor(s): Eric Munro
SPIE'S INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION
18-23 July 1999
Denver, CO, United States
Electron-Beam Lithography
Proc. SPIE 3777, Uniform large-area thermionic cathode for SCALPEL, 0000 (15 November 1999); https://doi.org/10.1117/12.370115
Proc. SPIE 3777, Uniform illumination in SCALPEL by imaging the angular distortion, 0000 (15 November 1999); https://doi.org/10.1117/12.370124
Proc. SPIE 3777, In-situ beam position monitoring system for electron-beam lithography, 0000 (15 November 1999); https://doi.org/10.1117/12.370133
Field Accuracy and Resolution Assessment
Proc. SPIE 3777, Accurate ray tracing through finite element solved potential distributions in charged particle optics, 0000 (15 November 1999); https://doi.org/10.1117/12.370137
Proc. SPIE 3777, Quantitative aberration assessment by a through focal analysis of pattern edge sharpness, 0000 (15 November 1999); https://doi.org/10.1117/12.370138
Proc. SPIE 3777, Approximation method of resolution based on information-passing capacity (IPC) of an electron optical system, 0000 (15 November 1999); https://doi.org/10.1117/12.370139
Electron Sources and Electron Emission
Proc. SPIE 3777, Modeling of laminar e-beam source for SCALPEL, 0000 (15 November 1999); https://doi.org/10.1117/12.370140
Proc. SPIE 3777, 3D simulation of flat-cathode electron guns with space charge, 0000 (15 November 1999); https://doi.org/10.1117/12.370116
Proc. SPIE 3777, Mesh-equipped Wehnelt source for SCALPEL, 0000 (15 November 1999); https://doi.org/10.1117/12.370117
Proc. SPIE 3777, Electron-beam-induced emission of electrons from insulators, 0000 (15 November 1999); https://doi.org/10.1117/12.370118
Aberration Analysis and Optimization
Proc. SPIE 3777, Simulation of multipole systems including primary and secondary aberration analysis, 0000 (15 November 1999); https://doi.org/10.1117/12.370119
Proc. SPIE 3777, Comparative study on magnetic variable axis lenses using electrostatic and magnetic in-lens deflectors, 0000 (15 November 1999); https://doi.org/10.1117/12.370120
Imaging
Proc. SPIE 3777, Construction and design of a high-resolution portable scanning electron microscope column, 0000 (15 November 1999); https://doi.org/10.1117/12.370121
Proc. SPIE 3777, Scanning thermionic emission imaging of cathode surfaces, 0000 (15 November 1999); https://doi.org/10.1117/12.370122
Proc. SPIE 3777, SEM voltage contrast simulations, 0000 (15 November 1999); https://doi.org/10.1117/12.370123
Ion Optics
Proc. SPIE 3777, High-efficiency MALDI-QIT-ToF mass spectrometer, 0000 (15 November 1999); https://doi.org/10.1117/12.370125
Proc. SPIE 3777, Optics study of the MMRL system, 0000 (15 November 1999); https://doi.org/10.1117/12.370126
Proc. SPIE 3777, Influence of first lens on magnification optimization method in two-lens FIB optical system, 0000 (15 November 1999); https://doi.org/10.1117/12.370127
Proc. SPIE 3777, Compact column design for a focused ion-beam lithography system, 0000 (15 November 1999); https://doi.org/10.1117/12.370128
Space Charge and Discrete Coulomb Interactions
Proc. SPIE 3777, Charge-tube method for space charge in beams, 0000 (15 November 1999); https://doi.org/10.1117/12.370129
Proc. SPIE 3777, Global space charge effects in high-throughput electron-beam lithography, 0000 (15 November 1999); https://doi.org/10.1117/12.370130
Proc. SPIE 3777, Simulation of discrete Coulomb interactions in high-current projection and multibeam columns, 0000 (15 November 1999); https://doi.org/10.1117/12.370131
Proc. SPIE 3777, Integration of an adaptive parallel N-body solver into a particle-by-particle electron-beam interaction simulator, 0000 (15 November 1999); https://doi.org/10.1117/12.370132
Energy Filters, Analyzers, and Curved Axis Systems
Proc. SPIE 3777, Design of energy filters for electron microscopes, 0000 (15 November 1999); https://doi.org/10.1117/12.370134
Proc. SPIE 3777, Fast parallel acquisition electron energy analyzer, 0000 (15 November 1999); https://doi.org/10.1117/12.370135
Proc. SPIE 3777, Numerical ray tracing of electrons in different 3D fringing fields of spherical deflectors, 0000 (15 November 1999); https://doi.org/10.1117/12.370136
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