Accurate ray tracing through finite element solved potential distributions in charged particle optics

Zhu Aiming; Anjam Khursheed

doi:10.1117/12.370137

15 November 1999 Accurate ray tracing through finite element solved potential distributions in charged particle optics

Zhu Aiming, Anjam Khursheed

Proceedings Volume 3777, Charged Particle Optics IV; (1999) https://doi.org/10.1117/12.370137
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper investigates the accuracy of direct ray tracing on finite element solved potential distributions in charged particle optics. The results show that while the conventional approach of first-order element solutions on region block meshes gives inaccurate results, reliable results are produced by the use of second-order elements and structured mesh refinement. Direct rays are plot on a test objective lens to calculate third and fifth-order spherical aberration coefficients can be kept below 1%. For the direct ray tracing of secondary electrons, a single pole objective test example is used to demonstrate that field interpolation may limit the final accuracy, and that in this case, structured mesh refinement is the most effective means for improving the accuracy.

Citation Download Citation

Zhu Aiming and Anjam Khursheed "Accurate ray tracing through finite element solved potential distributions in charged particle optics", Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); https://doi.org/10.1117/12.370137

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available