17 September 1999 Microlens arrays based on chalcogenide glass resists using the proximity microlithography method
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Abstract
A simple microlens array fabrication process based on chalcogenide glass As-Se and As-S photoresists is described. Specific properties of chalcogenide photoresists important for microlenses preparation and the parameters of fabricated spherical and cylindrical microlens arrays are measured and discussed.
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Salman Noach, Salman Noach, M. Manevich, M. Manevich, Matvei Klebanov, Matvei Klebanov, Victor Lyubin, Victor Lyubin, Naftali Paul Eisenberg, Naftali Paul Eisenberg, } "Microlens arrays based on chalcogenide glass resists using the proximity microlithography method", Proc. SPIE 3778, Gradient Index, Miniature, and Diffractive Optical Systems, (17 September 1999); doi: 10.1117/12.363753; https://doi.org/10.1117/12.363753
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