5 October 1999 Novel design concepts for UV laser beam shaping
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Abstract
Recent developments in the field of high transmitting beam shaping optics for material processing are presented. Central parts of these optics are non-rotationally symmetric optical elements (NOEs). Advanced design principles for NOEs are presented. An optical setup containing a NOE and a system for the adaptation of the spatial coherence properties of excimer lasers to the processing requirements are presented together with beam diagnosis and material processing results. In comparison to results obtained earlier a largely increased beam shaping performance is demonstrated.
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Joerg Bernges, Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, Reinhart Poprawe, "Novel design concepts for UV laser beam shaping", Proc. SPIE 3779, Current Developments in Optical Design and Optical Engineering VIII, (5 October 1999); doi: 10.1117/12.368201; https://doi.org/10.1117/12.368201
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